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Characterization of ultra thin oxynitrides: a general approach
Publication:
Characterization of ultra thin oxynitrides: a general approach
Date
2000
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry
;
De Witte, Hilde
;
Vandervorst, Wilfried
;
Nakajima, K.
;
Kimura, K.
;
Genchev, I.
;
Bermaier, A.
;
Goergens, L.
;
Neumaier, P.
;
Dollinger, G.
;
Döbeli, M.
Journal
Nuclear Instruments and Methods B
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2
since deposited on 2021-10-14
Acq. date: 2025-10-23
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1932
since deposited on 2021-10-14
Acq. date: 2025-10-23
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Downloads
2
since deposited on 2021-10-14
Acq. date: 2025-10-23
Views
1932
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations