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Characterization of ultra thin oxynitrides: a general approach

Date

2000
Journal article
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dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorGenchev, I.
dc.contributor.authorBermaier, A.
dc.contributor.authorGoergens, L.
dc.contributor.authorNeumaier, P.
dc.contributor.authorDollinger, G.
dc.contributor.authorDöbeli, M.
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T12:42:06Z
dc.date.available2021-10-14T12:42:06Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4150
dc.source.beginpage429
dc.source.endpage434
dc.source.journalNuclear Instruments and Methods B
dc.source.volume161-163
dc.title

Characterization of ultra thin oxynitrides: a general approach

dc.typeJournal article
dspace.entity.typePublication
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