Browsing by Author "Bernard, Sophie"
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Publication Advances and challenges in dual-tone development process optimization
Proceedings paper2009, Optical Microlithography XXII, 22/02/2009, p.72740IPublication Advances in process optimization for dual-tone development as a double patterning technique
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Analysis of the effect of point-of-use filtration on microbridging defectivity
Proceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.72730SPublication Effect of PAG distribution on ArF and EUV resist performance
Journal article2009, Journal of Photopolymer Science and Technology, (22) 1_6, p.97-104Publication Feasibility study on dual tone development for frequency doubling
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Impact of using filtration on global and local uniformity of spin on glue materials
Proceedings paper2011, Micromachining and Microfabrication Process Technology XVI, 22/01/2011, p.79260F