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Browsing by Author "Bersani, M."

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    TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

    Barozzi, Mario
    ;
    Iacob, E
    ;
    van den Berg, J.A.
    ;
    Reading, M.A.
    ;
    Adelmann, Christoph  
    Meeting abstract
    2011, 18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII, 18/09/2011

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