Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Berti, Andrea"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists

    Fallica, Roberto  
    ;
    Nannarone, Stefano
    ;
    Mahne, Nicola
    ;
    Malvezzi, Andrea Marco
    ;
    Berti, Andrea
    Journal article
    2021, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (34) 1, p.99-103

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings