Publication:

Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists

Date

2021
Journal article
https://doi.org/10.2494/photopolymer.34.99
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Author(s)

Fallica, Roberto  
;
Nannarone, Stefano
;
Mahne, Nicola
;
Malvezzi, Andrea Marco
;
Berti, Andrea
;
De Simone, Danilo  

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

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1133 since deposited on 2023-06-20
Acq. date: 2025-10-28

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1133 since deposited on 2023-06-20
Acq. date: 2025-10-28

Citations