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Browsing by Author "Besling, Wim F. A."

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    Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy

    Puurunen, Riikka
    ;
    Vandervorst, Wilfried  
    ;
    Besling, Wim F. A.
    ;
    Richard, Olivier  
    ;
    Bender, Hugo  
    Journal article
    2004, Journal of Applied Physics, (96) 9, p.4878-4889

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