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Browsing by Author "Bhargava, Naipur"

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    Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs

    Rosseel, Erik  
    ;
    Dhayalan, Sathish Kumar
    ;
    Hikavyy, Andriy  
    ;
    Loo, Roger  
    ;
    Profijt, Harald
    Proceedings paper
    2016, SiGe, Ge, and Related Materials: Materials, Processing, and Devices 7, 2/10/2016, p.347-359

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