Publication:
Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
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1899 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-15
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Views
1899 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-15
Citations