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Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
Publication:
Selective epitaxial growth of high-P Si:P for dource/drain formation in advanced Si nFETs
Date
2016
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rosseel, Erik
;
Dhayalan, Sathish Kumar
;
Hikavyy, Andriy
;
Loo, Roger
;
Profijt, Harald
;
Kohen, David
;
Kubicek, Stefan
;
Chiarella, Thomas
;
Yu, Hao
;
Horiguchi, Naoto
;
Mocuta, Dan
;
Barla, Kathy
;
Thean, Aaron
;
Bartlett, Greg
;
Margetis, Joe
;
Bhargava, Naipur
;
Tolle, John
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Abstract
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1894
since deposited on 2021-10-23
Acq. date: 2025-10-26
Citations
Metrics
Views
1894
since deposited on 2021-10-23
Acq. date: 2025-10-26
Citations