Browsing by Author "Bihr, Simon"
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Publication Simulation of polychromatic effects in high NA EUV lithography
;Erdmann, Andreas ;Mesilhy, Hazem ;Evanschitzky, Peter ;Saadeh, QaisSoltwisch, VictorProceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021