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Browsing by Author "Bihr, Simon"

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    Simulation of polychromatic effects in high NA EUV lithography

    Erdmann, Andreas
    ;
    Mesilhy, Hazem
    ;
    Evanschitzky, Peter
    ;
    Saadeh, Qais
    ;
    Soltwisch, Victor
    Proceedings paper
    2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021

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