Publication:

Simulation of polychromatic effects in high NA EUV lithography

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600931

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Author(s)

Erdmann, Andreas

;

Mesilhy, Hazem

;

Evanschitzky, Peter

;

Saadeh, Qais

;

Soltwisch, Victor

;

Bihr, Simon

;

Zimmermann, Joerg

;

Philipsen, Vicky

Journal

Proceedings of SPIE

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1739 since deposited on 2022-05-22

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Acq. date: 2026-05-17