Publication:

Simulation of polychromatic effects in high NA EUV lithography

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2600931
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Author(s)

Erdmann, Andreas
;
Mesilhy, Hazem
;
Evanschitzky, Peter
;
Saadeh, Qais
;
Soltwisch, Victor
;
Bihr, Simon
;
Zimmermann, Joerg
;
Philipsen, Vicky  

Journal

Proceedings of SPIE

Abstract

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1731 since deposited on 2022-05-22
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1731 since deposited on 2022-05-22
425item.page.metrics.field.last-week
Acq. date: 2025-10-24

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