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Browsing by Author "Bilodeau, S"

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    Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition

    Witters, Liesbeth  
    ;
    Arimura, Hiroaki  
    ;
    Sebaai, Farid  
    ;
    Hikavyy, Andriy  
    ;
    Milenin, Alexey  
    ;
    Loo, Roger  
    Journal article
    2017, IEEE Transactions on Electron Devices, (64) 4, p.4587-4593
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    Publication

    Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition

    Witters, Liesbeth  
    ;
    Sebaai, Farid  
    ;
    Hikavyy, Andriy  
    ;
    Milenin, Alexey  
    ;
    Loo, Roger  
    Proceedings paper
    2017-06, Symposium on VLSI Technology, 5/06/2017, p.194-195

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