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Browsing by Author "Blakeney, A."

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    Lithographic performance of 193 nm single and bi-layer materials

    Goethals, Mieke
    ;
    Pollers, Ingrid
    ;
    Van Roey, Frieda  
    ;
    Sugihara, Takashi
    ;
    Ronse, Kurt  
    Journal article
    1998, Journal of Photopolymer Science and Technology, (11) 3, p.513-23

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