Publication:

Lithographic performance of 193 nm single and bi-layer materials

Date

1998
Journal article
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2578.pdf 1.5 MB

Author(s)

Goethals, Mieke
;
Pollers, Ingrid
;
Van Roey, Frieda  
;
Sugihara, Takashi
;
Ronse, Kurt  
;
Van Driessche, Veerle  
;
Tzviatkov, Plamen
;
Medina, A.
;
Gabor, A.
;
Blakeney, A.
;
Steinhausler, T.
;
Biafore, J.
;
Slater, S.
;
Nalamasu, O.
;
Houlihan, F.
;
Kometani, J.
;
Timko, A.
;
Cirelli, R.

Journal

Journal of Photopolymer Science and Technology

Abstract

Description

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1990 since deposited on 2021-09-30
Acq. date: 2026-02-24

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1990 since deposited on 2021-09-30
Acq. date: 2026-02-24

Citations