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Browsing by Author "Blasco, N."

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    Deposition Of Ru and RuO2 flms for DRAM electrode

    Schaekers, Marc  
    ;
    Capon, B.
    ;
    Detavernier, C.
    ;
    Blasco, N.
    Meeting abstract
    2010, 218th ECS Meeting Symposium 'Atomic Layer Deposition Applications 6', 10/10/2010, p.1425

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