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Deposition Of Ru and RuO2 flms for DRAM electrode
Publication:
Deposition Of Ru and RuO2 flms for DRAM electrode
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Date
2010
Meeting abstract
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schaekers, Marc
;
Capon, B.
;
Detavernier, C.
;
Blasco, N.
Journal
Abstract
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1868
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Acq. date: 2025-12-09
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Metrics
Views
1868
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-09
Citations