Browsing by Author "Blasco, Nicolas"
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Publication ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
Oral presentation2010, 10th International Conference on Atomic Layer Deposition - ALDPublication ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
Oral presentation2008, Workshop GerALDPublication Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
Journal article2013, Applied Physics Letters, (102) 11, p.111910Publication Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer deposition
Meeting abstract2012, Materials for Advanced Metallization - MAM, 11/03/2012, p.O7-02Publication Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition
Journal article2011, Applied Physics Letters, (98) 16, p.162902Publication The deposition Of Ru and RuO2 flms for DRAM electrode
Proceedings paper2010, Atomic Layer Deposition Applications 6, 10/10/2010, p.135-144