Publication:
ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
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1975 since deposited on 2021-10-17
Acq. date: 2025-12-08
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Views
1975 since deposited on 2021-10-17
Acq. date: 2025-12-08
Citations