Publication:
ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
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1976 since deposited on 2021-10-17
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Acq. date: 2026-01-10
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1976 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-10
Citations