Browsing by Author "Blatz, Joshua"
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Publication Vacuum-ultraviolet-radiation damage of low-k dielectrics
;Shohet, J. Leon ;Kim, Sang-Heum ;Nguyen, Ha ;Xue, Panpan ;Blatz, Joshua ;Cheng, HaoyuLin, Yi-HungMeeting abstract2018, AVS Meeting & Exhibition 2018, 26/10/2018, p.PS-TuP22