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Browsing by Author "Blatz, Joshua"

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    Publication

    Vacuum-ultraviolet-radiation damage of low-k dielectrics

    Shohet, J. Leon
    ;
    Kim, Sang-Heum
    ;
    Nguyen, Ha
    ;
    Xue, Panpan
    ;
    Blatz, Joshua
    ;
    Cheng, Haoyu
    ;
    Lin, Yi-Hung
    Meeting abstract
    2018, AVS Meeting & Exhibition 2018, 26/10/2018, p.PS-TuP22

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