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Vacuum-ultraviolet-radiation damage of low-k dielectrics
Publication:
Vacuum-ultraviolet-radiation damage of low-k dielectrics
Date
2018
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shohet, J. Leon
;
Kim, Sang-Heum
;
Nguyen, Ha
;
Xue, Panpan
;
Blatz, Joshua
;
Cheng, Haoyu
;
Lin, Yi-Hung
;
de Marneffe, Jean-Francois
;
Redzheb, Murad
;
Armini, Silvia
;
Chen, Cheng-chi
;
Wu, Yuting
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2043
since deposited on 2021-10-26
427
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
2043
since deposited on 2021-10-26
427
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations