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Browsing by Author "Boehm, Klaus"

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    Application of pixel-based mask optimization technique for high-transmission attenuated PSM

    Sakajiri, Kyohei
    ;
    Tritchkov, Alexander
    ;
    Granik, Yuri
    ;
    Hendrickx, Eric  
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2009, Design for Manufacturability through Design-Process Integration III, 22/02/2009, p.72750X

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