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Browsing by Author "Boissière, Olivier"

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    Thermally-stable high effective work function TaCN thin films for metal gate electrode applications

    Adelmann, Christoph  
    ;
    Meersschaut, Johan  
    ;
    Ragnarsson, Lars-Ake  
    ;
    Conard, Thierry  
    Journal article
    2009, Journal of Applied Physics, (105) 5, p.53516

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