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Browsing by Author "Bommels, Juergen"

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    Ruthenium metallization for advanced interconnects

    Wen, Liang Gong
    ;
    Adelmann, Christoph  
    ;
    Varela Pedreira, Olalla  
    ;
    Dutta, Shibesh
    Proceedings paper
    2016, IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC, 23/05/2016, p.34-36

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