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Browsing by Author "Bontemps, N."

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    Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node

    Gupta, Anshul  
    ;
    Mertens, Hans  
    ;
    Tao, Zheng  
    ;
    Demuynck, Steven  
    ;
    Boemmels, Juergen  
    Proceedings paper
    2020, IEEE Symposium on VLSI Technology and Circuits, JUN 15-19, 2020

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