Browsing by Author "Booth, Jean-Paul"
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Publication A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Journal article2012, Plasma Sources Science and Technology, (21) 6, p.65004Publication Planar Langmuir probe in pulsing regime
Meeting abstract2011-05, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM, 5/05/2011