Browsing by Author "Booth, Jean-Paul"
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Publication A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Journal article2012, Plasma Sources Science and Technology, (21) 6, p.65004Publication Planar Langmuir probe in pulsing regime
Meeting abstract2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM, 5/05/2011