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A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Publication:
A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Date
2012
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Samara, Vladimir
;
Booth, Jean-Paul
;
de Marneffe, Jean-Francois
;
Milenin, Alexey
;
Brouri, Mohand
;
Boullart, Werner
Journal
Plasma Sources Science and Technology
Abstract
Description
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Views
1975
since deposited on 2021-10-20
Acq. date: 2025-10-22
Citations
Metrics
Views
1975
since deposited on 2021-10-20
Acq. date: 2025-10-22
Citations