A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring

dc.contributor.author	Samara, Vladimir
dc.contributor.author	Booth, Jean-Paul
dc.contributor.author	de Marneffe, Jean-Francois
dc.contributor.author	Milenin, Alexey
dc.contributor.author	Brouri, Mohand
dc.contributor.author	Boullart, Werner
dc.contributor.imecauthor	de Marneffe, Jean-Francois
dc.contributor.imecauthor	Milenin, Alexey
dc.contributor.imecauthor	Boullart, Werner
dc.contributor.orcidimec	Milenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimec	Boullart, Werner::0000-0001-7614-2097
dc.date.accessioned	2021-10-20T15:40:37Z
dc.date.available	2021-10-20T15:40:37Z
dc.date.issued	2012
dc.identifier.issn	0963-0252
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21450
dc.identifier.url	http://iopscience.iop.org/0963-0252/21/6/065004/
dc.source.beginpage	65004
dc.source.issue	6
dc.source.journal	Plasma Sources Science and Technology
dc.source.volume	21
dc.title	A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
dc.type	Journal article
dspace.entity.type	Publication
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