Browsing by Author "Botermans, Harry"
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Publication Manufacturable DUV lithography processes for 0.25 μm technology contact and via layers
Journal article1997, Microelectronic Engineering, (35) 1_4, p.517-522Publication NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levels
Proceedings paper1997, Optical Microlithography X, 12/03/1997, p.320-332Publication Optical proximity effects and correction strategies for chemical amplified DUV resists
Proceedings paper1996, Optical Microlithography IX, 10/03/1996, p.622-633