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Browsing by Author "Bourov, Anatoly"

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    Mask-induced polarization effects at high NA

    Estroff, Andrew
    ;
    Fan, Yongfa
    ;
    Bourov, Anatoly
    ;
    Smith, Bruce
    ;
    Foubert, Philippe  
    ;
    Leunissen, Peter
    Proceedings paper
    2005-03, Optical Microlithography XVIII, 28/02/2005, p.555-566

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