Browsing by Author "Brüner, Philipp"

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High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS

Brongersma, Hidde
;
Bauer, Peter
;
Brüner, Philipp
;
Grehl, Thomas
;
Van den Berg, Jaap
Oral presentation
2012, 25th International Conference on Atomic Collisions in Solids
Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

Brüner, Philipp
;
Grehl, T.
;
Jourdan, Nicolas
;
Steinbauer, E.
;
Bauer, P.
;
Brongersma, H.
Meeting abstract
2015, 15th International Conference on Atomic Layer Deposition - ALD, 28/06/2015