Publication:
High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS
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1921 since deposited on 2021-10-20
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Acq. date: 2025-10-25
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Views
1921 since deposited on 2021-10-20
412item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations