Publication:
High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS
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1927 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-15
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Metrics
Views
1927 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-15
Citations