Browsing by Author "Braggin, Jennifer"
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Publication Analysis of the effect of point-of-use filtration on microbridging defectivity
Proceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.72730SPublication Characterizing immersion lithography micro bridge defects using advanced features of teh SEMVision G3 STAR FIB
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009Publication Micro-bridge defects: characterization and root cause analysis
Proceedings paper2010, Metrology, Inspection and Process Control for Microlithography XXIV, 21/02/2010, p.763820Publication Point-of-use filtration methods to reduce defectivity
Proceedings paper2010, Advances in Resist Materials & Processing Technology XXVII, 21/02/2010, p.763918