Browsing by Author "Braginsky, O.V"
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Publication Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material
;Mankelevivh, Yu.A. ;Braginsky, O.V ;Kovalev, A.S. ;Lopaev, D.V. ;Malykhin, E.M.Rakhimova, T.V.Meeting abstract2010, Materials for Advanced Metallization Conference - MAM, 8/03/2010