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Browsing by Author "Braginsky, O.V"

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    Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material

    Mankelevivh, Yu.A.
    ;
    Braginsky, O.V
    ;
    Kovalev, A.S.
    ;
    Lopaev, D.V.
    ;
    Malykhin, E.M.
    ;
    Rakhimova, T.V.
    Meeting abstract
    2010, Materials for Advanced Metallization Conference - MAM, 8/03/2010

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