Browsing by Author "Braithwaite, Nicholas"
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Publication A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
Publication Development and characterization of a fast neutral beam source for damage-free etching
Meeting abstract2014, 41st IOP Plasma Physics Conference, 14/04/2014Publication Development of a novel wafer probe for in-situ measurements
Oral presentation2013, Plasma Technological Workshop UKPublication Development of a novel wafer probe for in-situ measurements
Meeting abstract2014, Plasma Etch and Strip in Microelectronics Workshop - PESM, 12/05/2014Publication Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
Journal article2015, Plasma Sources Science and Technology, (24) 6, p.65008Publication Influence of the ion bombardment of O2 plasmas on low-k materials
Journal article2011, Thin Solid Films, (520) 1, p.464-468