Browsing by Author "Braithwaite, Nicholas St. J."
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Publication Ar and H2 plasma and neutral/ion beam treatment of EUV resist
Proceedings paper2015-03, Advanced Etch Technology for Nanopatterning IV, 22/02/2015, p.94280CPublication Development of a novel wafer-probe for in situ measurements of thin film properties
Journal article2015, Plasma Sources Science and Technology, (24) 3, p.32002