Browsing by Author "Brand, Omri"

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Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

Alkoken, Ran
;
Baram, Mor
;
Oron, Gadi
;
Schuch, Nivea
;
Robert, Frederic
;
Figueiro, Thiago
Proceedings paper
2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295516
Unbiased roughness measurements for 0.55NA EUV material setup

Mathew, Bobin
;
Arad, Shahar
;
Brand, Omri
;
Frank, Tal
;
Alkoken, Ran
;
Shilo, Yael
;
Melamed, Yarden
Proceedings paper
2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 1249607