Browsing by Author "Braun, S."
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Publication Characterization of etch residues generated on damascene structures
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.227-231Publication Implanted photoresist remover for advanced nodes including SiGe, Ge and high k-metals
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.17-20