Browsing by Author "Brause, E."
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Publication A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation
;Lauerhaas, Jeff ;Wu, Y. ;Bran, M. ;Fraser, B. ;Brause, E.Nicolosi, T.Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.151-157