Browsing by Author "Brennan, B."
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Publication Atomic layer deposition of HfO2 thin films on InxGa1-xAs
;O'Mahony, A. ;O'Connor, E. ;Long, R. ;Thomas, K. ;Povey, I.M. ;Hurley, P.K. ;Pemble, M.E.Brennan, B.Oral presentation2008, 8th International Conference on Atomic Layer Deposition - ALD