Publication:
Atomic layer deposition of HfO2 thin films on InxGa1-xAs
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2053 since deposited on 2021-10-17
2last month
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Acq. date: 2026-07-15
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Statistics
Views
2053 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-07-15
Citations