Publication:
Atomic layer deposition of HfO2 thin films on InxGa1-xAs
Date
| dc.contributor.author | O'Mahony, A. | |
| dc.contributor.author | O'Connor, E. | |
| dc.contributor.author | Long, R. | |
| dc.contributor.author | Thomas, K. | |
| dc.contributor.author | Povey, I.M. | |
| dc.contributor.author | Hurley, P.K. | |
| dc.contributor.author | Pemble, M.E. | |
| dc.contributor.author | Brennan, B. | |
| dc.contributor.author | Hughes, G. | |
| dc.contributor.author | Brammertz, Guy | |
| dc.contributor.author | Afanas'ev, V.V. | |
| dc.contributor.imecauthor | Brammertz, Guy | |
| dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
| dc.date.accessioned | 2021-10-17T09:29:33Z | |
| dc.date.available | 2021-10-17T09:29:33Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14251 | |
| dc.source.conference | 8th International Conference on Atomic Layer Deposition - ALD | |
| dc.source.conferencedate | 30/06/2008 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | Atomic layer deposition of HfO2 thin films on InxGa1-xAs | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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