Browsing by Author "Brongersma, H."
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Publication Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers
Meeting abstract2015, 15th International Conference on Atomic Layer Deposition - ALD, 28/06/2015Publication On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS
Oral presentation2001, 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.