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On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS
Publication:
On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Janssens, Tom
;
Huyghebaert, Cedric
;
Vandervorst, Wilfried
;
Gildenpfennig, A.
;
Brongersma, H.
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2002
since deposited on 2021-10-14
Acq. date: 2025-10-29
Citations
Metrics
Views
2002
since deposited on 2021-10-14
Acq. date: 2025-10-29
Citations