On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS

dc.contributor.author	Janssens, Tom
dc.contributor.author	Huyghebaert, Cedric
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Gildenpfennig, A.
dc.contributor.author	Brongersma, H.
dc.contributor.imecauthor	Huyghebaert, Cedric
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Huyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned	2021-10-14T17:05:26Z
dc.date.available	2021-10-14T17:05:26Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5368
dc.source.conference	13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.
dc.source.conferencelocation
dc.title	On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS
dc.type	Oral presentation
dspace.entity.type	Publication
Files
Publication available in collections:	Presentations

Date