Browsing by Author "Brose, Sascha"
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Publication Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet
Proceedings paper2017, International Conference on Extreme Ultraviolet Lithography, 11/09/2017, p.104501LPublication EUV scattering from carbon nanotube pellicles: measurement and control
Journal article2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 2, p.021007Publication EUV scattering from CNT pellicles: measurement and control
Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.1160911