Browsing by Author "Brunner, Timothy"
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Publication EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction
; ; ; ; van de Kerkhof, Mark A..Journal article2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 4, p.41013Publication EUV vote-taking lithography: Crazy.... or not ?
Proceedings paper2018, Extreme Ultraviolet (EUV) Lithography IX, 26/02/2018, p.105830I