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Browsing by Author "Buchanan, Keith"

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    Publication

    Direct Bonding Using Low Temperature SiCN Dielectrics

    Iacovo, Serena  
    ;
    Nagano, Fuya  
    ;
    Channam, Venkat Sunil Kumar  
    ;
    Walsby, Edward
    ;
    Crook, Kath
    Proceedings paper
    2022, 72nd IEEE Electronic Components and Technology Conference (ECTC), MAY 31-JUN 01, 2022, p.602-607

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