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Browsing by Author "Burk, Y."

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    Characterization of etch residues generated on damascene structures

    Le, Quoc Toan  
    ;
    Kesters, Els  
    ;
    Hoflijk, Ilse  
    ;
    Conard, Thierry  
    ;
    Shen, M.
    ;
    Braun, S.
    ;
    Burk, Y.
    Proceedings paper
    2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.227-231

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