Browsing by Author "Burke, Ed"
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
Proceedings paper2013, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 24/09/2013, p.706-707