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Browsing by Author "Burke, Ed"

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    Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)

    Kim, Min-Soo  
    ;
    Ritzenthaler, Romain  
    ;
    Everaert, Jean-Luc
    ;
    Fernandez, Luis
    ;
    Devriendt, Katia  
    Proceedings paper
    2013, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 24/09/2013, p.706-707

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