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Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
Publication:
Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
Date
2013
Proceedings Paper
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27267.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Min-Soo
;
Ritzenthaler, Romain
;
Everaert, Jean-Luc
;
Fernandez, Luis
;
Devriendt, Katia
;
Lee, Jae Woo
;
Redolfi, Augusto
;
Mertens, Sofie
;
Burke, Ed
;
Horiguchi, Naoto
;
Thean, Aaron
Journal
Abstract
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2421
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
2421
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations