Publication:
Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
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2430 since deposited on 2021-10-21
6last month
Acq. date: 2025-12-09
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Views
2430 since deposited on 2021-10-21
6last month
Acq. date: 2025-12-09
Citations