Publication:
Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
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2436 since deposited on 2021-10-21
5last month
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Acq. date: 2026-02-28
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Statistics
Views
2436 since deposited on 2021-10-21
5last month
2last week
Acq. date: 2026-02-28
Citations